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Testing Integrated Pressure Sensors on Wafer Level
Andreas Reithofer, Infineon Technologies
Pressure sensors for automotive applications like MAP and BAP measurements are benchmarked in terms of accuracy and commonly used in today’s engine management systems. The major challenge for testing is the application of nonelectric parameters on ewafer level. Using the example of a Teradyne A565 quad site test package for a barometric pressure sensor, this presentation shows different methods of pressure application. With the explanation of the functionality and the comparison of the advantages and disadvantages it shows which of the described methods meets the requirements best.
Andreas Reithofer has been a Test Engineer in the Corporate Test Technology Group of Infineon Technologies since March, 2002. His main tasks include the evaluation and development of new test methods and concepts for testing mixed-signal and automotive products, and test package conversions and ratio topics. From October, 2000 through February 2002 he worked as a Test Engineer for Mixed- Signal products. He holds a M.S. in Electrical Engineering.